There is an Oily Gunk on My Mask. Is My Facemask Deteriorating From Ozone or Activated Oxygen?

The oily residue on your mask is likely skin-oil from your face. You can wash your facemask following the manufacturer’s instructions. The ozone or O3 has been designed to use on the CPAP equipment and should never cause damage to your facemask, nasal pads, or tubing. You will want to be sure to replace your CPAP equipment as often as the manufacturer for it suggests.